• All sections
• H - Electricity
• H01L - Semiconductor devices not covered by class
• H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components

Patent holdings for IPC class H01L 21/67

Total number of patents in this class: 24112

10-year publication summary

Principal owners for this class